Waferpedia

Brooks

ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot

Brooks ATM family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Brooks ATM ABM 105 107 107 B is an atmospheric wafer handling robot. The ATM ABM 105 107 107 B handles 6 and 12 inch wafers. The ATM ABM 105 107 107 B uses a single-arm configuration.[1][2]

BrooksATM ABM 105 107 107 B Atmospheric Wafer Handling Robot
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What it is

The Brooks ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot is an atmospheric wafer handling robot.[1]

The Brooks ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot is a single-arm tool.[1]

What do the numbers mean?

Wafer handling2

Type
Atmospheric wafer handling robot[1]
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Wafer size
6 inch and 12 inch[1]
Accurate?

Configuration & options4

Single Arm[1]
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Manufacturer
Brooks / PRI[1]
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Model
ATM / ABM 105 / 107 / 107 B[1]
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Arm configuration
Single arm[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Brooks ATM ABM 105 107 107 B?

The Brooks ATM ABM 105 107 107 B is an atmospheric wafer handling robot.[1]

Not publicly documented

The following facts about the ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot — Brooks | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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