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ABM 205 Atmospheric Wafer Handling Robot

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

BrooksABM 205 Atmospheric Wafer Handling Robot
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What it is

The ABM 205 is a single-arm robot that handles 6-inch and 12-inch wafers.[1][2][3]

What do the numbers mean?

Wafer handling1

Wafer size
6 inch, 12 inch[1]
Accurate?

Configuration & options2

Single Arm[1]
Accurate?
Arm configuration
Single arm[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the ABM 205 handle?

The ABM 205 handles 6-inch and 12-inch wafers.[1][2][3]

Is the ABM 205 a single-arm or dual-arm robot?

The ABM 205 is a single-arm robot.[1][2][3]

Not publicly documented

The following facts about the ABM 205 Atmospheric Wafer Handling Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ABM 205 Atmospheric Wafer Handling Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ABM 205 Atmospheric Wafer Handling Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ABM 205 Atmospheric Wafer Handling Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ABM 205 Atmospheric Wafer Handling Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ABM 205 Atmospheric Wafer Handling Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]ABM 205 Atmospheric Wafer Handling Robot — Brooks | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]Brooks ABM 205 Atmospheric Wafer Handling Robot family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 23, 2026.

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