ASML
Twinscan AT 850 D
The ASML Twinscan AT 850 D is a lithography system from ASML. The ASML Twinscan AT 850 D uses a Cymer ELS 7600 laser for its light source. The ASML Twinscan AT 850 D also includes a Tel Lithius Track.[1][2]
What it is
What do the numbers mean?
Power & electrical3
- 50/60 Hz[3]
Optics & imaging2
Configuration & options5
- With Tel Lithius Track[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ASML Twinscan AT 850 D - Laser: Cymer ELS 7600 - With Tel Lithius Track | — | — | States a Cymer ELS 7600 laser and Tel Lithius Track. | Equipment inventory listing[1] |
| ASML Twinscan AT 850 D - 50/60 Hz - Laser: Cymer ELS 6610 - With Tel Lithius Track | — | — | States 50/60 Hz and a Cymer ELS 6610 laser with Tel Lithius Track. | Equipment inventory listing[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Twinscan AT 850 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan AT 850 D are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Twinscan AT 850 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan AT 850 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan AT 850 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Twinscan AT 850 D are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
Last updated Sep 30, 2026.