ASML
PAS 5500 60
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The ASML PAS 5500/60 is a sub-half-micron i-line stepper. The ASML PAS 5500/60 processes 200 mm wafers with 450 nm resolution. The ASML PAS 5500/60 uses a 365 nm near-UV light source.[1][2]
What it is
The ASML PAS 5500 / 60 is a step-and-repeat i-line stepper system used in semiconductor photolithography.[2]
The machine delivers throughputs up to 48 eight-inch wafers per hour.[2]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Parts have been swapped out
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the throughput of the PAS 5500 / 60?
The system delivers throughputs up to 48 eight-inch wafers per hour.[2]
Not publicly documented
The following facts about the PAS 5500 60 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PAS 5500 60 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PAS 5500 60 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PAS 5500 60 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PAS 5500 60 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PAS 5500 60 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]snfguide.stanford.edu — snfguide.stanford.edusnfguide.stanford.edu
- [2]web.archive.org — asml.com (Jan 25, 2006)web.archive.org
- [3]inventory listing
Last updated Sep 25, 2026.