Applied Materials
DPS Metal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Applied Materials DPS Metal etcher is an inductively coupled plasma (ICP) etch chamber designed for metal etching in semiconductor fabrication. The DPS Metal etcher processes 200 mm wafers and uses gases such as Cl2 and BCl3 for aluminum etching.[1]
What it is
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Surface material influences BC1 density; BC1 density is highest above photoresist and lowest above aluminum
- BC1 density decreases with N2 addition due to N2* driven dissociation
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the DPS Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DPS Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DPS Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DPS Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the DPS Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DPS Metal are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]osti.gov — osti.govosti.gov
- [2]Inventory photo
Last updated Oct 7, 2026.
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