Applied Materials
Centura DPS Aluminum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Applied Materials Centura DPS Aluminum is an 8-inch wafer etcher. Applied Materials Centura DPS Aluminum includes DPS R1 metal etch chambers, ASP+ strip chambers, and a fast cool down section.[1]
What it is
How it works
General reference — not yet source-verifiedAn etch tool removes selected material from a wafer by exposing the surface to a controlled plasma or reactive chemistry while the chamber environment and process recipe shape the etch behavior.
A wafer etch system commonly uses separate chamber sections for the etch step, post-etch strip, and thermal management so the process can move from material removal to residue handling and cooling within one platform.
Where it fits in the process flow
General reference — not yet source-verifiedThe Applied Materials Centura DPS Aluminum Etcher sits in the wafer etch portion of semiconductor processing, where patterned films are removed after lithographic definition.
The platform's metal etch chambers indicate use in metal pattern transfer, while the strip chambers indicate a downstream step for removing remaining polymer or resist material after etching.
Applications
What do the numbers mean?
Wafer handling1
Configuration & options6
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Centura DPS Aluminum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura DPS Aluminum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura DPS Aluminum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura DPS Aluminum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura DPS Aluminum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura DPS Aluminum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Centura DPS Aluminum — Applied Materials | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 9, 2026.
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