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Applied Materials

Centura DPS 2 Poly Dry

EtchApplied Materials Centura DPS family
Research Quality: 20% complete
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

Applied Materials Centura DPS 2 Poly Dry Etcher is a 300mm dry etcher with a DPS metal chamber and 200mm ESC.

What do the numbers mean?

Gas & chemistry1

Gas
O2, CHF3, Ar, CF4, O2/He, He, N2, HBr, CL2, NF3[1]
Accurate?

Configuration & options5

300mm DPS Metal chamber with 200mm ESC[1]
Accurate?
Mainframe
300mm[1]
Accurate?
Back end metal etch[1]
Accurate?
OS
Windows NT[1]
Accurate?
Missing
23.11.08 1 LL off line[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasO2, CHF3, Ar, CF4, O2/He, He, N2, HBr, CL2, NF3[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Centura DPS 2 Poly Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura DPS 2 Poly Dry are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura DPS 2 Poly Dry are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura DPS 2 Poly Dry are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura DPS 2 Poly Dry are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura DPS 2 Poly Dry is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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