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Applied Materials

Centura 5200 WXZ Metal

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What it is

The Applied Materials Centura 5200 WXZ Metal is a chemical vapor deposition system for 8-inch wafers.[1]

How it works

The Centura 5200 WXZ Metal is a metal CVD system.[1][2][3]

The Centura 5200 WXZ Metal has a Sprint W configuration.[1][2][3]

Where it fits in the process flow

The Centura 5200 WXZ Metal is used where a controlled metal film must be deposited on 8-inch wafers.[1]

Applications

The Centura 5200 WXZ Metal is used for metal film deposition in semiconductor manufacturing.[1][2][3]

The tool supports processing on 8-inch wafers.[1][2][3]

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[2]
Accurate?

Gas & chemistry1

Process type
Metal CVD (Chemical Vapor Deposition)[1]
Accurate?

Configuration & options4

Sprint W[1]
Accurate?
Category
Deposition[1]
Accurate?
OEM
Applied Materials[2]
Accurate?
Model
Centura 5200 WXZ[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Centura 5200 WXZ Metal CVD———Equipment inventory listing[2]
Centura 5200 WXZ Metal CVD Sprint W——Sprint W configurationEquipment inventory listing[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Process typeMetal CVD (Chemical Vapor Deposition)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Centura 5200 WXZ Metal support?

The Centura 5200 WXZ Metal supports 8-inch wafers.[2][3]

What is the full model designation of this equipment?

The full model is Centura 5200 WXZ Metal, also referred to as Centura 5200 WXZ Metal CVD.[2][3][1]

Not publicly documented

The following facts about the Centura 5200 WXZ Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 WXZ Metal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Centura 5200 WXZ Metal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura 5200 WXZ Metal are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura 5200 WXZ Metal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Centura 5200 WXZ Metal are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
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Last updated Oct 5, 2026.

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