Waferpedia

Applied Materials

Centura 4.0 DPN

DepositionApplied Materials Centura family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Applied Materials Centura 4.0 DPN is a deposition tool in the Centura family. The model designation DPN stands for Decoupled Plasma Nitride.[1][3]

How it works

General reference — not yet source-verified

A decoupled plasma nitride deposition system uses a plasma source to create reactive species for nitride film growth while separating major process controls so plasma generation and wafer-bias conditions can be adjusted independently. A deposition tool of this class applies thin films to a wafer surface inside a controlled process chamber.

Applications

The Applied Materials Centura 4.0 DPN is used for nitride deposition.[1][3]

What do the numbers mean?

Wafer handling1

Wafer size
12 inch[2]
Accurate?

Configuration & options5

Gate Stack[1]
Accurate?
OEM
Applied Materials[2]
Accurate?
Model
Centura 4.0 DPN[2]
Accurate?
Description
Decoupled Plasma Nitride[2]
Accurate?
Category
Deposition[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Centura 4.0 DPN Plus Chamber———fabsurplus.com[3]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does DPN stand for?

DPN stands for Decoupled Plasma Nitride.[2][1][3]

Not publicly documented

The following facts about the Centura 4.0 DPN are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 4.0 DPN are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Centura 4.0 DPN are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura 4.0 DPN are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura 4.0 DPN is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Centura 4.0 DPN are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Oct 3, 2026.

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