Waferpedia

Applied Materials

5500 100 D

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Applied Materials 5500 / 100 D is a lithography stepper/scanner.[1][2]

Applied Materials logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Applied Materials 5500 100 D is a stepper and scanner used in lithography.[1][2]

How it works

General reference — not yet source-verified

During operation, a stepper aligns a photomask above a substrate. The substrate is coated with a photosensitive resist. A light source illuminates the mask, exposing the resist in the open areas. The substrate is then moved, and the process repeats until the entire substrate is exposed.

A scanner uses a precisely controlled beam of light to write the pattern directly onto the resist. The beam is focused to a small spot and moved across the substrate in a raster pattern, creating the desired features.

Where it fits in the process flow

General reference — not yet source-verified

In a semiconductor fabrication line, lithography equipment is used after the substrate has been cleaned and coated with a photosensitive resist. After exposure, the substrate moves to a developing step where the imprinted pattern becomes visible, followed by etching or deposition to transfer the pattern into the substrate layers.

What do the numbers mean?

Configuration & options3

equipmentType
Stepper / Scanner[1]
Accurate?
category
Lithography[2]
Accurate?
vintageYear
1996[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the function of the Applied Materials 5500 100 D?

The Applied Materials 5500 100 D is a stepper and scanner used in lithography.[1][2]

Who manufactured the Applied Materials 5500 100 D?

The Applied Materials 5500 100 D was manufactured by Applied Materials.[1][2]

What category of equipment is the 5500 100 D?

The 5500 100 D is categorized as lithography equipment.[2]

Not publicly documented

The following facts about the 5500 100 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5500 100 D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 5500 100 D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 5500 100 D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 5500 100 D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 5500 100 D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 1, 2026.

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