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Aixtron

BlackMagic 6

Aixtron BlackMagic 6 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Aixtron BlackMagic 6 is a plasma-enhanced chemical vapor deposition (PECVD) system. The BlackMagic 6 processes 6-inch wafers. The BlackMagic 6 is used for carbon nanotube and graphene synthesis.[1]

AixtronBlackMagic 6
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Vacuum

4 to 6 mbar[1]

Gas delivery

Ar, N2[1]

How it works

In a typical graphene synthesis sequence using the BlackMagic 6, the chamber is first heated to a target temperature in an inert atmosphere, then a plasma is ignited with controlled power, pressure, and gas composition. The substrate is cooled after the deposition, and the samples are unloaded below threshold temperatures to avoid oxidation or contamination.[1]

Applications

Research applications demonstrated with the BlackMagic 6 include the study of sapphire surface termination effects on graphene crystallinity, using plasma etching to create hydrophilic or hydrophobic surfaces that influence the quality of the synthesized graphene layer.[1]

What do the numbers mean?

Vacuum & pumping1

Process pressure range
4 to 6 mbar[1]
Accurate?

Wafer handling1

Wafer size
6 inch[2]
Accurate?

Gas & chemistry1

Process gases
Ar, N2[1]
Accurate?

Configuration & options3

Type
PECVD[1]
Accurate?
Maximum temperature (top heater)
900 °C[1]
Accurate?
Maximum temperature (bottom heater)
800 °C[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Process pressure range4 to 6 mbar[1]
  • Process gasesAr, N2[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the BlackMagic 6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BlackMagic 6 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the BlackMagic 6 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the BlackMagic 6 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the BlackMagic 6 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the BlackMagic 6 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]arxiv.org — arxiv.orgarxiv.org
  2. [2]Equipment inventory listing
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Last updated Sep 22, 2026.

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