Advanced Energy
PDX 2500
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Advanced Energy PDX 2500 is an RF generator. The Advanced Energy PDX 2500 is a medium-frequency plasma generator. The Advanced Energy PDX 2500 has output power up to 2500 W and a fixed frequency range of 370-430 kHz.[1][2]
How it works
A plasma power generator accepts three-phase AC input and converts it to a controlled medium-frequency output. The PDX 2500 uses a 208 V, three-phase, 50/60 Hz input as a model-family specification. The output frequency is fixed within the range of 370 to 430 kHz, which is not interchangeable with a 13.56 MHz RF source. The generator delivers power through an output connector to a matching network, which then drives the plasma in the process chamber.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Discontinued and obsolete
- Parts are no longer in production
What do the numbers mean?
Power & electrical5
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the output power rating of the PDX 2500?
The PDX 2500 is rated for an output power of up to 2500 W (2.5 kW).[1][2]
What is the output frequency range?
The generator operates at a fixed frequency in the range of 370 to 430 kHz.[1][2]
What input voltage and phase does it require?
The PDX 2500 is specified for a 208 V, three-phase, 50/60 Hz input.[1]
Which OEM tools use this generator?
Applied Materials and Novellus semiconductor equipment use the PDX 2500 generator.[1]
Not publicly documented
The following facts about the PDX 2500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PDX 2500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PDX 2500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PDX 2500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PDX 2500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PDX 2500 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]wsemi.com — wsemi.comwsemi.com
- [2]palrepair.com — palrepair.compalrepair.com
- [3]dealer listingfabsurplus.com
- [4]dealer listingfabsurplus.com
- [5]Equipment dealer listingfabsurplus.com
Last updated Sep 29, 2026.