Waferpedia

Accretech

UF 200 S

Test & Probe200mmAccretech UF 200 family
Research Quality: 40% complete
UF 200 S — Inventory photo
Fig. 01UF 200 SInventory photo[1]

Wafer size

200mm

Power

208 VAC, Single Phase[1]

Vacuum

Over -53K MPa[1]

What it is

The Accretech / TSK UF 200 S is a wafer prober manufactured by Accretech (formerly TSK). The tool is configured for 200 mm (8 inch) wafer operation.[2][1][3]

How it works

General reference — not yet source-verified

In operation, the prober positions the wafer beneath a probe card, aligns to alignment marks, then steps the wafer or probe card to contact each die in sequence. Electrical measurements are taken through the probe needles and recorded by an external tester.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Not operational due to control board failure.

What do the numbers mean?

Power & electrical2

Voltage
208 VAC, Single Phase[1]
Accurate?
Full Load AMPS
7.2A[1]
Accurate?

Vacuum & pumping2

Vacuum
Over -53K MPa[1]
Accurate?
Air Supply Source Pressure
0.45Mpa or more[1]
Accurate?

Wafer handling6

Loader, Wafer Handling
Backside Holding[1]
Accurate?
Wafer Size
5",6",8", Currently 8"(200mm) Configured[1]
Accurate?
HOT Chuck[1]
Accurate?
Wafer Sizes
8 inch[2]
Accurate?
Wafer Size
200mm[3]
Accurate?
HOT Chuck
Present[1]
Accurate?

Control & software2

GPIB Interface[1]
Accurate?
GPIB Interface
Present[1]
Accurate?

Dimensions & facilities1

Weight (Main Body)
900kg (Standard)[1]
Accurate?

Configuration & options15

Air
Over 0.45 MPa[1]
Accurate?
Frequency
50/60Hz[1]
Accurate?
Wiring Configuration
2Wire + Ground[1]
Accurate?
Main Breaker Rating
10A[1]
Accurate?
Interrupt Current
10KA A.I.C[1]
Accurate?
Diagram Number
FE06000[1]
Accurate?
Yield Check Function[1]
Accurate?
FAIL Check Function[1]
Accurate?
X/Y axis
Probing Area(±120mm), Maximum Speed(200m/s)[1]
Accurate?
Power Consumption
Approximately 1.5kVA[1]
Accurate?
Manipulator
MHF300L[1]
Accurate?
Make
Accretech / TSK[2]
Accurate?
Model
UF 200 S[2]
Accurate?
Yield Check Function
Present[1]
Accurate?
FAIL Check Function
Present[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • VacuumOver -53K MPa[1]
  • Voltage208 VAC, Single Phase[1]
  • Full Load AMPS7.2A[1]
  • Air Supply Source Pressure0.45Mpa or more[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the UF 200 S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UF 200 S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UF 200 S are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UF 200 S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the UF 200 S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the UF 200 S are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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