Waferpedia

Tool family

Zygo 8070-0159-02 7712 Stage

Zygo1 entry

Zygo 8070-0159-02 7712 Stage Laser.

Models in this family

  1. The Zygo 8070-0159-02 / 7712 Stage Laser is a laser system compatible with Canon FPA 5000 and FPA 6000 lithography tools.