Waferpedia

Tool family

YES 253B-60-2-2

The MKS Type 253B-60-2-2 is an exhaust throttle valve designed to regulate removal of gas from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B-60-2-2 is an exhaust throttle valve designed to regulate removal of gas from a vacuum chamber when used with an MKS controller.