Waferpedia

Tool family

YES 253B-1-40-2

YES1 entry

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve that regulates the removal of gas from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B Exhaust Throttle Valve is a butterfly valve that regulates the removal of gas from a vacuum chamber when used with an MKS controller.