Waferpedia

Tool family

Ultron UH 130 Wafer Frame Expander

Ultron1 entry

Models in this family

  1. The Ultron UH130 Die Matrix Expander is a pneumatic wafer frame expander that uses a heated stage to precisely control die separation for wafers up to 200 mm (8 inches).

    Cited variants

    DesignationGenerationVintageChangesSource
    UH130——Base model accommodating wafers up to 200 mm (8 inches). Motorized circular cutter is an option.ultronsystems.com[1]
    UH130-12——Accommodates wafers up to 300 mm (12 inches). Motorized circular cutter is standard. Lower and upper clamp assemblies hinge separately to allow use of larger grip rings.ultronsystems.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]ultronsystems.comultronsystems.com