Waferpedia

Tool family

Ultratech 1700

The Ultratech 1700 is a stepper mentioned in a datasheet for Shipley LOL1000/LOL2000 lift-off layers, used in thin film head and semiconductor lithography for 1 μm features.

Models in this family

  1. The Ultratech 1700 is a stepper mentioned in a datasheet for Shipley LOL1000/LOL2000 lift-off layers, used in thin film head and semiconductor lithography for 1 μm features.