Waferpedia

Tool family

Tokyo Electron Tactras RLSA

Tokyo ElectronEtch2 entries
LinkedIn X Email

Models in this family

  1. Tactras RLSA

    The Tokyo Electron Tactras RLSA is a polysilicon dry etch chamber for 300mm wafers that uses microwave plasma technology.

  2. Tactras RLSA Process

    The Tokyo Electron Tactras RLSA Process is an etch process chamber for 12-inch wafers used for poly etch.

All entries

  1. Tactras RLSATokyo Electron

    The Tokyo Electron Tactras RLSA is a polysilicon dry etch chamber for 300mm wafers that uses microwave plasma technology.

    CategoryEtch
    9 specs
  2. Tactras RLSA ProcessTokyo Electron

    The Tokyo Electron Tactras RLSA Process is an etch process chamber for 12-inch wafers used for poly etch.

    CategoryEtch
    8 specs