Tokyo Electron Mark

Models in this family

1. Mark 7

   The Tokyo Electron Mark 7 is a platform used in the CLEAN TRACK series for wafer processing, including coater/developer and scrubber systems.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Mark 7 Coater / Developer	—	—	Listed as a Coater / Developer configuration of Mark 7.	Equipment inventory listing[1]

2. 

   Mark 8

   The Tokyo Electron Mark 8 is a photoresist coating and developing track system used in semiconductor lithography.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Tel Mark 8 Developer	—	1993	Developer configuration for 6-inch wafers.	Equipment inventory listing[2]
   Tel Mark 8 Coater	—	1992	Coater configuration for 6-inch wafers.	Equipment inventory listing[3]
   Tel MARK 8	—	1998	8-inch SOGT configuration.	Equipment inventory listing[4]
   Mark 8 Developer	—	1993	—	Equipment inventory listing[2]
   Mark 8 Coater	—	1992	—	Equipment inventory listing[3]
   Mark 8	—	1998	Listed as a coater/developer with parallel wafer flow processing software option (simultaneous coat & develop).	Equipment inventory listing[5]
   Mark 8 Coater (6 inch)	—	1992	Coater-only configuration for 6-inch wafers	Equipment inventory listing[3]
   Mark 8 Coater (8 inch)	—	1996	Coater-only configuration for 8-inch wafers	Equipment inventory listing[6]
   Mark 8 SOGT	—	1998	SOGT variant (Spin-On-Glass Thin? or similar process)	Equipment inventory listing[4]
   Mark 8 Coater/Developer	—	—	Combined coater and developer with parallel wafer flow processing	Equipment inventory listing[5]

3. Mark VIII

   The Tokyo Electron Mark VIII is a photoresist developer and coater system used in semiconductor manufacturing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Tel Mark VIII Developer	—	1998	2 develop cups, 2 chill plates, 4 chill hot plates, 4 low temp hot plates, WEE Right; main frame: Dual Block; gas: TMAH; OS: DOS	Equipment inventory listing[7]

Sources