Tool family
The Temescal VCT-1800 is a thin film deposition system configured with sputtering sources, an electron beam gun, and an ion source. The Temescal VCT-1800 has a water-cooled, RF-bias rotating substrate holder with a usable area of seven inches in diameter.
The Temescal VCT-1800 is a thin film deposition system configured with sputtering sources, an electron beam gun, and an ion source. The Temescal VCT-1800 has a water-cooled, RF-bias rotating substrate holder with a usable area of seven inches in diameter.