Waferpedia

Tool family

Tegal 703 RPPS

TegalEtch1 entry

The Tegal 703 RPPS is a plasma inline etcher referenced in source material from Tegal equipment listings.

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Models in this family

  1. 703 RPPS

    The Tegal 703 RPPS is a plasma inline etcher referenced in source material from Tegal equipment listings.