SPTS CET25

Models in this family

1. CET25

   The SPTS CET25 is a 25-wafer batch process module for HF vapor release etch for MEMS.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Primaxx CET25-CPX	—	—	—	fabsurplus.com[1]
   Primaxx CET25-VPX	—	—	—	auction.fabexchange.com[2]

Sources