Waferpedia

Tool family

Semitool 870

Semitool3 entries

Models in this family

  1. The Semitool 870 is a spin rinser/dryer that rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

  2. The Semitool 870 S is a Dual Stack Spin Rinse Dryer (SRD) used in semiconductor wet processing.

  3. The Semitool 870 S is a spin rinse dryer (SRD) manufactured by Semitool for wet-processing and drying of semiconductor wafers.

All entries

  1. 870Semitool

    The Semitool 870 is a spin rinser/dryer that rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

    CategorySpin Rinser/DryerWafer3"
    5 specs
  2. 870 S Dual Stack Spin RinseSemitool

    The Semitool 870 S is a Dual Stack Spin Rinse Dryer (SRD) used in semiconductor wet processing.

    CategoryWet Processing / Clean
    7 specs
  3. 870 S SRDSemitool

    The Semitool 870 S is a spin rinse dryer (SRD) manufactured by Semitool for wet-processing and drying of semiconductor wafers.

    12 specs