The SCREEN FC-3100 Wet Station is capable of a throughput of 1,000 wafers per hour and incorporates a Low Pressure Drying System (HiLPD) for improved drying performance.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| FC-3100 | — | — | — | screen.co.jp[1] |
| DNS 3100 | — | — | — | Equipment inventory listing[2] |