Waferpedia

Tool family

Plasma-Therm Corial 200S

Plasma-Therm1 entry

The Corial 200S is a Plasma-Therm Corial brand product for R&D and low-volume production. The Corial 200S is described as highly adaptable and useful for pilot production and experimentation.

Models in this family

  1. The Corial 200S is a Plasma-Therm Corial brand product for R&D and low-volume production. The Corial 200S is described as highly adaptable and useful for pilot production and experimentation.