Oxford Instruments Plasmalab 80

Models in this family

1. 

   Plasmalab 80 Plus

   Oxford Instruments Plasmalab 80+ is a compact open-loading reactive ion etch system for R&D or small-scale production.

2. 

   Plasmalab 80 Plus RIE

   Oxford Instruments Plasmalab 80 Plus RIE is a reactive ion etcher with support for wafers up to 8 inches.

3. 

   Plasmalab 80 Plus RIE-PECVD

   The Oxford Instruments Plasmalab 80 Plus RIE-PECVD is a dual-chamber reactive ion etcher and plasma-enhanced chemical vapor deposition system.

4. 

   Plasmalab 80 uP RIE

   Oxford Instruments Plasmalab 80 uP RIE is a reactive ion etcher that was mainly used for O2 plasma processing and includes a vacuum pump.