Waferpedia

Tool family

Ontrak DSS 200

OntrakCMP5 entries

Models in this family

  1. DSS 200 Series II Postintroduced 2023

    The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.

  2. The Ontrak DSS 200 is a semiconductor manufacturing system that processes 8-inch wafers.

  3. The Ontrak DSS 200 Post is a double-sided PVA post-CMP wafer scrubber. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.

    Cited variants

    DesignationGenerationVintageChangesSource
    Ontrak DSS200 Series 1——Designed to clean 100mm to 200mm wafers and has a universal load station.axustech.com[1]
    Ontrak DSS200 Series 2——Offers production-proven cleaning results, throughputs of 45-65 wafers per hour, and a 200mm ergonomic load station.axustech.com[2]
  4. The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.

  5. The Ontrak DSS 200 Synergy is a wet processing and cleaning system used in semiconductor manufacturing for wafer surface preparation and contamination removal.

All entries

  1. DSS 200 Series II PostOntrak

    The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.

    CategoryCMP
    39 specs
  2. DSS 200Ontrak

    The Ontrak DSS 200 is a semiconductor manufacturing system that processes 8-inch wafers.

    Wafer8"
    12 specs
  3. DSS 200 PostOntrak

    The Ontrak DSS 200 Post is a double-sided PVA post-CMP wafer scrubber. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.

    CategoryCMP
    6 specs
  4. DSS 200 Series II WaferOntrak

    The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.

    CategoryWet Processing / Clean
    1 spec
  5. DSS 200 SynergyOntrak

    General referenceThe Ontrak DSS 200 Synergy is a wet processing and cleaning system used in semiconductor manufacturing for wafer surface preparation and contamination removal.

    CategoryWet Processing / Clean
    15 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]axustech.comaxustech.com
  2. [2]axustech.comaxustech.com