Tool family
The OAI 806 Mask Aligner is a manual wafer load mask aligner used for photolithography, supporting wafer sizes up to 6 inches with submicron alignment accuracy.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MBA 806 | — | — | Manual wafer load mask aligner with 350W NUV lamphouse, 5x objectives, Thomson Industries Quickslide system, and specific mask holder/chuck configurations. | classoneequipment.com[1] |