Nikon NSR 2205 i 14 E

Models in this family

1. NSR 2205 i 14 E

   The Nikon NSR 2205 i 14 E is an i-line stepper for 200 mm wafer lithography, with a 365 nm exposure source, 0.35 μm resolution or better, and an exposure field of 22 mm square to 17.9 (H) x 25.2 (V) mm.