Lam Research TCP 9600 SE

Models in this family

1. TCP 9600 SE

   The Lam Research TCP 9600 SE is a transformer-coupled plasma (TCP) etch system for metal layer etching, capable of processing 6-inch and 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   TCP 9600 SE Metal	—	—	Metal etch configuration	waferpedia.com[1]

Sources