Lam Research TCP 9600

Models in this family

1. 

   9600

   The Lam 9600 is an 8-inch etch system configured with a main chamber, entrance load-lock, and DSQ/exit load-lock, running Envision Software.

2. 

   9600 BRME Metal

   The Lam 9600 BRME is a metal etch system with an 8-inch wafer size.

3. 

   9600 Dry

   The Lam Research TCP 9600 is a dry etch system for metal etching, designed for 200 mm wafers.

4. 

   9600 Metal

   The Lam 9600 Metal is an etch strip wafer-chamber system using BCL3, C2, SF6, HE, and AR chemistries.

5. 9600 SE TCP Rainbow
6. 9600 TCP Metal

   The Lam Research 9600 TCP Metal is a plasma etch system for metal and dielectric etching. The Lam Research 9600 TCP Metal supports 6-inch and 8-inch wafers.

7. TCP 9600

   The Lam Research TCP 9600 is an 8-inch wafer etch tool.

8. 

   TCP 9600 Metal

   The Lam Research TCP 9600 Metal is a single-wafer, vacuum load-locked, low-pressure metal etch system from the Rainbow platform.

9. 

   TCP 9600 SE Metal

   The Lam TCP 9600 SE Metal Etch is a plasma etch system for metal layers on 6-inch and 8-inch wafers.