Waferpedia

Tool family

Lam Research SEZ SP 203

Lam ResearchEtch2 entries
LinkedIn X Email

Models in this family

  1. SEZ SP 203

    Cited variants

    DesignationGenerationVintageChangesSource
    SEZ SP 203 Spin——Listed as a spin etcher.waferpedia.com[1]
  2. SEZ SP 203 Spin

All entries

  1. SEZ SP 203Lam Research
    CategoryWet Processing / Clean
    33 specs
  2. SEZ SP 203 SpinLam Research
    CategoryEtch
    16 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com