Waferpedia

Tool family

Lam Research Gasonics Aura

Lam Research2 entries
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Models in this family

  1. Gasonics Aura 2000
  2. Gasonics Aura 3010

    The Lam/Novellus/Gasonics Aura 3010 is an asher used for photoresist removal in semiconductor manufacturing.

All entries

  1. Gasonics Aura 2000Lam Research
    3 specs
  2. Gasonics Aura 3010Lam Research

    The Lam/Novellus/Gasonics Aura 3010 is an asher used for photoresist removal in semiconductor manufacturing.

    CategoryResist Processing
    12 specs