Waferpedia

Tool family

Lam Research Exelan Flex

Lam Research1 entry

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    2300 Exelan Flex FX——Described as chamber only and associated with dielectric etch.macquarie.com[1]
    2300e4 Exelan Flex GX—2018Described as a 2300e4 platform with Exelan Flex GX configuration.macquarie.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]macquarie.commacquarie.com
  2. [2]macquarie.commacquarie.com