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Tool family

Lam Research 2300 Versys Kiyo Polysilicon

Lam ResearchEtch1 entry
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Models in this family

  1. 2300 Versys Kiyo Polysilicon

    The Lam Research 2300 Versys Kiyo Polysilicon Etch is a 300mm wafer plasma etch system designed for polysilicon etching.

    Cited variants

    DesignationGenerationVintageChangesSource
    2300 V2——3 load ports, 4 Kiyo CX chambers, ATM and VTM robots, software SP15-HF6media-moov-co.s3.us-west-1.amazonaws.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]media-moov-co.s3.us-west-1.amazonaws.commedia-moov-co.s3.us-west-1.amazonaws.com