KLA Archer 10

Models in this family

1. Archer 10

   The KLA Archer 10 is an automated overlay registration measurement system that uses a coherence probe interference microscope.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Archer 10 XT Overlay	—	—	Refurbishment-upgraded components and software version 5.6; XP computer upgrade; KLASS RS2 computer; 5 AMS; digitizer; LINNIK; PDA; PZT-P-Z feedback	waferpedia.com[1]

Sources