Waferpedia

Tool family

Kawasaki 3 NX 520 B A 008 Atmospheric Wafer Robot

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Models in this family

  1. 3 NX 520 B A 008 Atmospheric Wafer Robot

    The Kawasaki 3 NX 520 B A 008 is an atmospheric wafer robot manufactured by Kawasaki for 12-inch wafers.