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Tool family

Hitachi Kokusai DJ 853

HitachiDeposition2 entries
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Models in this family

  1. Kokusai DJ 853 V

    Hitachi Kokusai DJ 853 V is a CVD (chemical vapor deposition) system for 8-inch wafers.

  2. Kokusai DJ 853 V J 3 Diffusion

    The Hitachi Kokusai DJ 853 V J 3 is a thermal/diffusion furnace that processes 8-inch wafers, is configured for nitride, and belongs to the Hitachi Kokusai DJ 853 family.

All entries

  1. Kokusai DJ 853 VHitachi

    Hitachi Kokusai DJ 853 V is a CVD (chemical vapor deposition) system for 8-inch wafers.

    CategoryDeposition
    1 spec
  2. Kokusai DJ 853 V J 3 DiffusionHitachi

    The Hitachi Kokusai DJ 853 V J 3 is a thermal/diffusion furnace that processes 8-inch wafers, is configured for nitride, and belongs to the Hitachi Kokusai DJ 853 family.

    CategoryThermal / Diffusion
    6 specs