EV Group 150

Models in this family

1. 

   150

   The EVG 150 Coater is a spin-on and spray-on coating system with chemistry cabinet, EBR/BSR, multiple pumps, two stations, and heated/chilled plates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   EVG150 up to 300 mm	—	—	Supports wafers up to 300 mm; up to 6 process modules; includes FOUP load ports; up to 20 bake/chill/vapor prime stacks; optional NanoSpray module for deep patterns.	evgroup.com[1]

Sources