Waferpedia

Tool family

Espec TCC-301W-10

Espec1 entry

The Espec TCC-301W-10 is a rapid-rate thermal cycle chamber with a temperature range of -70°C to +180°C and a temperature change rate of 10K/min.

Models in this family

  1. The Espec TCC-301W-10 is a rapid-rate thermal cycle chamber with a temperature range of -70°C to +180°C and a temperature change rate of 10K/min.