Waferpedia
Waferpedia
/
CHA
/
CHA Mark 50 LH Vacuum
Tool family
CHA Mark 50 LH Vacuum
CHA
·
Deposition
·
1 entry
LinkedIn
X
Email
Copy link
Models in this family
Mark 50 LH Vacuum
The CHA Mark 50 LH is a vacuum evaporator that supports 6-inch wafers.
