Waferpedia

Tool family

Axcelis Fusion 200

Axcelis1 entry

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    200 PCU-P—2000Described as a UV bake version with 200 mm vintage.fabsurplus.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com