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Axcelis
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Axcelis Fusion 200
Tool family
Axcelis Fusion 200
Axcelis
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Models in this family
Fusion 200
Cited variants
Designation
Generation
Vintage
Changes
Source
200 PCU-P
—
2000
Described as a UV bake version with 200 mm vintage.
fabsurplus.com
[1]
Sources
Sources (1)
Every fact above is drawn from these public sources
[1]
fabsurplus.com
fabsurplus.com