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Tool family

ASML PAS 2400

ASMLLithography1 entry

The PAS 2400 is an early photolithography system from ASML that was demonstrated in 1985 and achieved a throughput of 90 wafers per hour.

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  1. PAS 2400

    The PAS 2400 is an early photolithography system from ASML that was demonstrated in 1985 and achieved a throughput of 90 wafers per hour.