Tool family
Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Mirra Mesa CMP 5201 | — | — | CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration. | waferpedia.com[1] |
The Applied Materials Mirra Mesa CMP 5201 is a CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.
Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.
The Applied Materials Mirra Mesa CMP 5201 is a CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.