Applied Materials Mirra

Models in this family

1. 

   Mirraproduced 2000–

   Applied Materials Mirra is an 8-inch chemical mechanical polisher with three polish platens and a wafer buff platen.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Applied Materials Mirra CMP	—	1999	Sources list configurations including Tungsten or Dielectric process use, software MP2B6.2_28 / MP2B6.2 28, three polish platens, and different polish head / flow controller descriptions.	Equipment inventory listing[1]
   Mirra	—	1999	—	Equipment inventory listing[1]
   Tungsten	—	1999	Listed with tungsten processing; one source also states 4 tungsten polish heads and one notes tungsten + polish heads.	Equipment inventory listing[1]
   Dielectric	—	1999	Listed with dielectric processing.	Equipment inventory listing[2]

2. 

   Mirra 3400

   The Applied Materials Mirra 3400 is a chemical mechanical planarization (CMP) system for 150 mm and 200 mm wafer processing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Mirra 3400 Stand-Alone	—	1996	Stand-alone configuration for Oxide/STI CMP, includes wet-in-wet-out handling and specific options such as TITAN1 UPA, DDF3 pad conditioner, and Windows NT control.	fabsurplus.com[3]

3. 

   Mirra 3600
4. Mirra Integra

   Applied Materials Mirra Integra is a CMP (Chemical Mechanical Polisher) for 8-inch wafers.

Sources