Applied Materials Enabler is a dielectric etch tool configured for 300 mm wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| Centura AP Enabler E5 | — | 2010 | Described as a dielectric etcher with 4 process chambers and a 300 mm version. | fabsurplus.com[1] |
| Centura AP Enabler FEOL-E5 | — | — | Identified as the front end E5 Enabler chamber in source material. | semistarcorp.com[2] |