Applied Materials DPS

Models in this family

1. DPS 2

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   CENTURA DPS 2 ETCH Metal 2ch / ASP 2ch	—	2007	Described as ETCH Metal 2ch / ASP 2ch and listed with Version 300 mm.	fabsurplus.com[1]

2. 

   DPS G 5 Mesa

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   PULSE POLY	—	2010	—	Equipment inventory listing[2]
   EFEM ONLY	—	2013	—	Equipment inventory listing[3]

3. 

   DPS II

   Applied Materials DPS II is an etch tool described as a second-generation 300mm system with a chamber that can be used for either silicon or metal etch.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   DPS II CIP	—	—	—	waferpedia.com[4]

4. 

   DPS II CIP

   The Applied Materials DPS II CIP is an etcher.

Sources