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Tool family

Applied Materials AMC 7821 EPI

Applied MaterialsDeposition1 entry
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Models in this family

  1. AMC 7821 EPI

    The Applied Materials AMC 7821 EPI is an epitaxial silicon deposition system for 6-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    AMC 7821 EPI—1983–2001—Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing