Tool family
Aixtron G 5 Plus MOCVD
Models in this family
The Aixtron G 5 Plus MOCVD is a metal organic chemical vapor deposition system for compound semiconductors, using a Planetary reactor module for GaN applications on 150/200 mm substrates.
Tool family
The Aixtron G 5 Plus MOCVD is a metal organic chemical vapor deposition system for compound semiconductors, using a Planetary reactor module for GaN applications on 150/200 mm substrates.
